Method for Cleaning of Microelectronic Structures with Aqueous Carbon Dioxide Systems

James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor), Joseph M. Desimone (Inventor)

Research output: Patent

Original languageEnglish (US)
Patent numberUS 6,641,678
StatePublished - 2003

Cite this

DeYoung, J., McClain, JB., Gross, S., & Desimone, J. M. (2003). Method for Cleaning of Microelectronic Structures with Aqueous Carbon Dioxide Systems. (Patent No. US 6,641,678).