| Original language | English (US) |
|---|---|
| Patent number | US 6,641,678 |
| State | Published - 2003 |
Method for Cleaning of Microelectronic Structures with Aqueous Carbon Dioxide Systems
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor), Joseph M. Desimone (Inventor)
Research output: Patent