Original language | English (US) |
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Patent number | US 6,613,157 |
State | Published - 2003 |
Method for Removing Particles from Microelectronic Structures
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor)
Research output: Patent
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor)
Research output: Patent
Original language | English (US) |
---|---|
Patent number | US 6,613,157 |
State | Published - 2003 |