| Original language | English (US) |
|---|---|
| Patent number | US 6,613,157 |
| State | Published - 2003 |
Method for Removing Particles from Microelectronic Structures
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor)
Research output: Patent
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor)
Research output: Patent
| Original language | English (US) |
|---|---|
| Patent number | US 6,613,157 |
| State | Published - 2003 |