Method for Removing Particles from Microelectronic Structures

James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor)

Research output: Patent

Original languageEnglish (US)
Patent numberUS 6,613,157
StatePublished - 2003

Cite this

DeYoung, J., McClain, JB., & Gross, S. (2003). Method for Removing Particles from Microelectronic Structures. (Patent No. US 6,613,157).