Method of Coating Microelectronic Substrates

James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor), D Taylor (Inventor), Mark Wagner (Inventor), D Brainard (Inventor)

Research output: Patent

Original languageEnglish (US)
Patent numberUS 6,989,172
StatePublished - 2006

Cite this

DeYoung, J., McClain, JB., Gross, S., Taylor, D., Wagner, M., & Brainard, D. (2006). Method of Coating Microelectronic Substrates. (Patent No. US 6,989,172).