| Original language | English (US) |
|---|---|
| Patent number | US 6,669,785 |
| State | Published - 2003 |
Cite this
DeYoung, J., Gross, S., Wagner, M., & McClain, JB. (2003). Methods and Compositions for Etch Cleaning Microelectronic Substrates. (Patent No. US 6,669,785).
Methods and Compositions for Etch Cleaning Microelectronic Substrates
James DeYoung (Inventor), Stephen Gross (Inventor), Mark Wagner (Inventor), JB McClain (Inventor)
Research output: Patent