Methods and Compositions for Etch Cleaning Microelectronic Substrates

James DeYoung (Inventor), Stephen Gross (Inventor), Mark Wagner (Inventor), JB McClain (Inventor)

Research output: Patent

Original languageEnglish (US)
Patent numberUS 6,669,785
StatePublished - 2003

Cite this

DeYoung, J., Gross, S., Wagner, M., & McClain, JB. (2003). Methods and Compositions for Etch Cleaning Microelectronic Substrates. (Patent No. US 6,669,785).