Methods for Transferring Supercritical Fluids in Microelectronic and Other Industrial Processes

James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor), Mark Wagner (Inventor)

Research output: Patent

Original languageEnglish (US)
Patent numberUS 6,905,555
StatePublished - 2005

Cite this

DeYoung, J., McClain, JB., Gross, S., & Wagner, M. (2005). Methods for Transferring Supercritical Fluids in Microelectronic and Other Industrial Processes. (Patent No. US 6,905,555).