| Original language | English (US) |
|---|---|
| Patent number | US 6,905,555 |
| State | Published - 2005 |
Methods for Transferring Supercritical Fluids in Microelectronic and Other Industrial Processes
James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor), Mark Wagner (Inventor)
Research output: Patent