Nanoscale rings from silicon-containing triblock terpolymers

Marc D. Rodwogin, Andrew Baruth, Elizabeth A. Jackson, C. Leighton, Marc A. Hillmyer

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Nanoscopic ring arrays of various materials show promise for both technological applications and fundamental studies. In this work we report the preparation of sub-50 nm diameter ring arrays from metallic thin films using a block polymer lithographic pattern transfer approach. We prepared a triblock terpolymer that adopts a core-shell cylindrical morphology where the shell is an oxidizable polydimethylsiloxane block. Solvent annealed thin films of this terpolymer produce cylindrical features oriented perpendicular to the substrate surface. The polydimethylsiloxane shell is then converted into SiO x rings by an oxygen reactive ion etch. The resultant hard mask pattern is then transferred into Au, Ni 80Fe 20, and Ni 80Cr 20 thin films via Ar ion beam milling, demonstrating the generality of the approach.

Original languageEnglish
Pages (from-to)3550-3557
Number of pages8
JournalACS Applied Materials and Interfaces
Volume4
Issue number7
DOIs
StatePublished - Jul 25 2012
Externally publishedYes

Fingerprint

Terpolymers
Silicon
Polydimethylsiloxane
Thin films
Metallic films
Ion beams
Block copolymers
Masks
Ions
Oxygen
Substrates
baysilon

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

Cite this

Rodwogin, M. D., Baruth, A., Jackson, E. A., Leighton, C., & Hillmyer, M. A. (2012). Nanoscale rings from silicon-containing triblock terpolymers. ACS Applied Materials and Interfaces, 4(7), 3550-3557. https://doi.org/10.1021/am300603x

Nanoscale rings from silicon-containing triblock terpolymers. / Rodwogin, Marc D.; Baruth, Andrew; Jackson, Elizabeth A.; Leighton, C.; Hillmyer, Marc A.

In: ACS Applied Materials and Interfaces, Vol. 4, No. 7, 25.07.2012, p. 3550-3557.

Research output: Contribution to journalArticle

Rodwogin, MD, Baruth, A, Jackson, EA, Leighton, C & Hillmyer, MA 2012, 'Nanoscale rings from silicon-containing triblock terpolymers', ACS Applied Materials and Interfaces, vol. 4, no. 7, pp. 3550-3557. https://doi.org/10.1021/am300603x
Rodwogin, Marc D. ; Baruth, Andrew ; Jackson, Elizabeth A. ; Leighton, C. ; Hillmyer, Marc A. / Nanoscale rings from silicon-containing triblock terpolymers. In: ACS Applied Materials and Interfaces. 2012 ; Vol. 4, No. 7. pp. 3550-3557.
@article{33ac3a3f60e54fe79b3dbdab1bafa447,
title = "Nanoscale rings from silicon-containing triblock terpolymers",
abstract = "Nanoscopic ring arrays of various materials show promise for both technological applications and fundamental studies. In this work we report the preparation of sub-50 nm diameter ring arrays from metallic thin films using a block polymer lithographic pattern transfer approach. We prepared a triblock terpolymer that adopts a core-shell cylindrical morphology where the shell is an oxidizable polydimethylsiloxane block. Solvent annealed thin films of this terpolymer produce cylindrical features oriented perpendicular to the substrate surface. The polydimethylsiloxane shell is then converted into SiO x rings by an oxygen reactive ion etch. The resultant hard mask pattern is then transferred into Au, Ni 80Fe 20, and Ni 80Cr 20 thin films via Ar ion beam milling, demonstrating the generality of the approach.",
author = "Rodwogin, {Marc D.} and Andrew Baruth and Jackson, {Elizabeth A.} and C. Leighton and Hillmyer, {Marc A.}",
year = "2012",
month = "7",
day = "25",
doi = "10.1021/am300603x",
language = "English",
volume = "4",
pages = "3550--3557",
journal = "ACS applied materials & interfaces",
issn = "1944-8244",
publisher = "American Chemical Society",
number = "7",

}

TY - JOUR

T1 - Nanoscale rings from silicon-containing triblock terpolymers

AU - Rodwogin, Marc D.

AU - Baruth, Andrew

AU - Jackson, Elizabeth A.

AU - Leighton, C.

AU - Hillmyer, Marc A.

PY - 2012/7/25

Y1 - 2012/7/25

N2 - Nanoscopic ring arrays of various materials show promise for both technological applications and fundamental studies. In this work we report the preparation of sub-50 nm diameter ring arrays from metallic thin films using a block polymer lithographic pattern transfer approach. We prepared a triblock terpolymer that adopts a core-shell cylindrical morphology where the shell is an oxidizable polydimethylsiloxane block. Solvent annealed thin films of this terpolymer produce cylindrical features oriented perpendicular to the substrate surface. The polydimethylsiloxane shell is then converted into SiO x rings by an oxygen reactive ion etch. The resultant hard mask pattern is then transferred into Au, Ni 80Fe 20, and Ni 80Cr 20 thin films via Ar ion beam milling, demonstrating the generality of the approach.

AB - Nanoscopic ring arrays of various materials show promise for both technological applications and fundamental studies. In this work we report the preparation of sub-50 nm diameter ring arrays from metallic thin films using a block polymer lithographic pattern transfer approach. We prepared a triblock terpolymer that adopts a core-shell cylindrical morphology where the shell is an oxidizable polydimethylsiloxane block. Solvent annealed thin films of this terpolymer produce cylindrical features oriented perpendicular to the substrate surface. The polydimethylsiloxane shell is then converted into SiO x rings by an oxygen reactive ion etch. The resultant hard mask pattern is then transferred into Au, Ni 80Fe 20, and Ni 80Cr 20 thin films via Ar ion beam milling, demonstrating the generality of the approach.

UR - http://www.scopus.com/inward/record.url?scp=84864189527&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864189527&partnerID=8YFLogxK

U2 - 10.1021/am300603x

DO - 10.1021/am300603x

M3 - Article

AN - SCOPUS:84864189527

VL - 4

SP - 3550

EP - 3557

JO - ACS applied materials & interfaces

JF - ACS applied materials & interfaces

SN - 1944-8244

IS - 7

ER -