Processes for Cleaning and Drying Microelectronic Structures Using Liquid or Supercritical Carbon Dioxide

James DeYoung (Inventor), JB McClain (Inventor), Stephen Gross (Inventor)

Department of Chemistry

Research output: Patent

Original language	English (US)
Patent number	US 6,562,146
State	Published - 2003

Cite this

DeYoung, J., McClain, JB., & Gross, S. (2003). Processes for Cleaning and Drying Microelectronic Structures Using Liquid or Supercritical Carbon Dioxide. (Patent No. US 6,562,146).