Sapphire advanced mitigation process: Wet etch to expose sub-surface damage and increase laser damage resistance and mechanical strength

T. Suratwala, R. Steele, J. Destino, L. Wong, M. Norton, T. Laurence, C. Aracne-Ruddle, P. Miller, N. Shen, M. Feit, N. Ray, W. Carr, C. Rivers, V. Peters, S. Jeppson, D. Malone, W. Greene

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