Loose abrasive grinding was performed on a wide range of optical workpiece materials [single crystals of Al 2 O 3 (sapphire), SiC, Y 3 Al 5 O 12 (YAG), CaF 2 , and LiB 3 O 5 (LBO); a SiO 2 -Al 2 O 3 -P 2 O 5 -Li 2 O glass-ceramic (Zerodur); and glasses of SiO 2 : TiO 2 (ULE), SiO 2 (fused silica), and P 2 O 5 -Al 2 O 3 -K 2 O-BaO (phosphate)]. Using the magneto rheological finishing (MRF) taper wedge technique (where a wedge was polished on each of the ground workpieces and the resulting samples were appropriately chemically etched), the subsurface mechanical damage (SSD) characteristics were measured. The SSD depth for most of the workpiece materials was found to scale as E1 1/2 / H 1 , where E 1 is the elastic modulus and H 1 is the hardness of the workpiece. This material scaling is the same as that for the growth of lateral cracks, suggesting that lateral cracks are a dominant source for SSD rather than radial/median cracks, as previously proposed. Utilizing the SSD depth data from both this study and others, semiempirical relationships have been formulated, which allows for estimating the SSD depth as a function of workpiece material and important grinding parameters (such as abrasive size and applied pressure).
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics